| Direction of travel |
XY axis two directions |
| Table size |
60 mm x 60 mm |
| Clamp method |
Operator side disk clamp |
| Mounting position |
Side |
| Transfer mechanism |
MHS4-6.5FPA (Fine pitch micrometer head) |
| Travel |
+/-3 mm |
| Lead of actuator |
0.1 mm |
| Scale interval |
Micrometer head 0.002 mm |
| Minimum resolution |
1 μｍ |
| Guiding method |
HG-VCR (V-groove and cross rollers) |
| Travel accuracy HV |
Straightness (horizontal and vertical) 1 μｍ |
| Travel accuracy YP |
Yawing 15sec, Pitching 25sec |
| Allowable moment |
Yawing 1200 N･cm, Pitching 1200 N･cm, Rolling 1200 N･cm |
| Moment rigidity |
Yawing rigidity 0.08 sec/N・cm, Pitching rigidity 0.60 sec/N・cm, Rolling rigidity 0.60 sec/N・cm |
| Parallelism |
30 μｍ |
| Parallelism of motion |
14 μｍ |
| XY Perpendicularity |
10 μｍ |
| Load capacity |
192.1 N (19.6 kgf) |
| Weight |
0.8 kg |
| Material / Surface treatment |
Stainless steel/Black chromium oxide |
| Standard accessories |
Inspection certificate
Mounting screw : Hexagon socket head cap screw M4, 4 screws |