Nano Chamber -CHUO PRECISION INDUSTRIAL CO.,LTD.-

Nano Chamber

NCB

Nano Chamber

Estimate separately

Product documentation

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Features

"Nano chamber" achieves accurate measurement and processing by installing in a general room-temperature room with the high-performance constant temperature/humidity air supply unit, which prevents expansion of materials in temperature/humidity changes in nano measurement and nano processing.
In addition, the cleanliness level also increases by selecting a collect filter that matches the installation environment. Especially for measurements with nano units, install the fine vibration removal board inside the chamber. The vibration from outside can be removed, and the measurement unit errors can be eliminated as much as possible for accurate measurement.（PAT.P）

With the fully-opening door, loading/unloading of the system can be easily carried out. In addition, due to easy disassembly, mounting after system installation is available.
In accordance with the temperature/humidity conditions of the installation location, acrylic boards are used for a location with a small temperature difference, and vacuum glasses are used for a location with a large temperature difference. In this way, the temperature and humidity condition in the nano chamber can be kept constant more effectively. In addition, because the transparent material can be used for the walls, inside of the chamber can be observed during the system operation.
As the sponge sheets are attached to the chamber door open/close section and the lower section of the system, high air-tightness level is kept.
The draw-out holes are provided to all surfaces of the chamber as to prevent adverse effects of the cords to the chamber inside environment.
The mounting hole for an exhaust duct is provided as a standard specification, so the air supply unit can be mounted later.
The air supply unit supplies clean process air inside of the chamber by controlling the temperature and humidity. As its temperature/humidity setting range is wide, its accuracy level and the stability level are high.
This air supply unit even suits to the clean area without any trouble of dust generation. By polish-finishing of the stainless steel surface, perfect cleaning is available without contamination inside of the chamber. As surrounding air is taken through all surfaces of the unit, contamination of the surrounding air by a leak of the air inside of the unit does not occur.

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Specifications

Chamber body　※Photographed product

Size	W1500㎜×D1200㎜×H2150㎜
Material	Frame: Stainless steel, Wall: Vacuum glass
Cleanliness	Applicable with the filter replacement

Air supply unit

Standard temperature setting range	DB＝21.00℃～25.00℃
Standard humidity setting range	RH＝35.0%～50.0%
Standard temperature stability	DB＝SV±0.05℃
Standard humidity stability	RH＝SV±0.3%
Filter trapping efficiency	HEPA0.3μmParticle μm99.99%
Power source	AC200V-3φ-50/60・
Power consumption amount	2.1kVA
Exterior dimension	W480㎜×D580㎜×H980㎜
Weight	115㎏

※Above is the specification of the system shown in the photograph above. The system size will be as requested by the customer.
※The air supply capacity of the unit varies in accordance with the nano camber capacity. An air supply unit with the most suitable air supply amount will be used.
※In case water-cooling specification is required as a utility, supply of the cooling water is required. In this case, the chiller unit can be connected for a usage.
※Fabrication of the air cooling unit is also available.

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Measurement inside of the nano chamber

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Constant temperature/humidity air supply unit

Constant temperature/humidity air supply unit used for the nano chamber supplies clean processing air with the temperature and humidity controls.
As together with improvement of various measuring equipment performance required for nano-unit high accuracy measurements, temperature and humidity conditions that match to ultra accurate equipment characteristics are satisfied. Not only temperature accuracy and cleanliness, humidity control function is also emphasized.
One example is the air conditions required for the supplied air for the high performance stepper. Highly-accurate temperature and humidity conditions that are required in environment for length measurement, thickness measurement, density measurement, etc. are provided.
This constant temperature and humidity air supply unit has adopted highly advanced technology element, as the unit can be even used for laboratory equipment that requires high accuracy. With these efforts, its accuracy has been improved dramatically.