Motorized Stages & Others

Set Up the Stage for High Precision

Installation using a dial gauge. (Recommended)
A dial gauge can be used to ensure that the stage runs parallel to a reference plane installed near the stage mounting attachment by the customer. The degree of parallelization is measured while moving the stage in the direction of the arrows and the installation position is chosen when the dial gauge displacement is minimum.
Trouble-free stage installation using an integral reference plane
High grade stages are equipped with an integral reference plane as shown in the following diagram.

When mounting the stage, parallel installation can be easily performed by lining up the integral reference plane to a reference plane or reference pin of the desired mounting location.

Usage Environment

Please be aware of the surrounding environment whenever using your motorized stage. Avoid use in places close to the upper and lower temperature extremes, places with harsh temperature variation, or places that contain a lot of dust. Please only use your device in environments that fall within the following temperature and humidity ranges.

Temperature: 10 to 40°C
Humidity: 20 to 80% RH

Operating in a Vacuum Environment

Vacuum levels can be expressed in units of bar, Pascal (Pa), or Torr. However recently, the Torr, which was popular for many years has been replaced by the SI derived unit of pressure; the Pascal (Pa).
[101325Pa ] Atmospheric pressure
[Up to approx. 100 Pa] Low vacuum, Vacuum pack level
[Up to approx. 10-1 Pa] Medium vacuum, Vacuum flask
[Up to approx. 10-5 Pa] High vacuum, Vacuum used for electron microscopes, or the environment surrounding the international space station
[Up to approx. 10-7 Pa] Ultra-high vacuum, Vacuum used for synchrotron radiation facilities, or the environment surrounding satellites
[Up to an extremely high vacuum】 Space, interstellar space
Tolerable degree of vacuum for motorized stage operation
After consultation with our company regarding specifications, up to 10-5Pa may be tolerated.
If you wish to use your device in a more extreme ultra-high vacuum environment, under certain special conditions there may be some cases where this device may be used after detailed consultation with us.
Summary of the specifications of motorized stages that can be used in a vacuum
Although fundamentally only provided through special one-off orders, we are able to offer the following support with a relatively short delivery time and at low price.
• Upgrading of standard models to have a vacuum-specified case, motor and grease.
• Tolerance for a vacuum pressure of 10-5 Pa.
• Installation of vacuum tolerant limit switches.
• The use of Fomblin® Y (Y-HVAC 140/13) high vacuum grease.
• The use of a quadrupole mass spectrometer to evaluate gas emitted in the vacuum and submit Q-mass data. (Optional)
• TiN code compatibility. (Optional)
• Through connections with vacuum chamber manufacturers, we can also offer tailor made vacuum chambers.
Use inside of a vacuum chamber
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