Table size ： 200 mm x 200 mm
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Table size ： 30 mm x 30 mm
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Table size ： 150 mm x 180 mm
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Z stage, High precision and high stiffness type
Table size ： 150 mm x 200 mm
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Table size ： 60 mm x 60 mm
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Z stage, High precision and high stiffness type
Table size ： 90 mm x 100 mm
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Table size ： 90 mm x 90 mm
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Table size ： 90 mm x 90 mm
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High-grade Z stage, Precision screw (Standard type)
Table size ： 40 mm x 40 mm
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High-grade Z stage, Precision screw (Symmetric type)
Table size ： 40 mm x 40 mm
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High-grade Z stage, Ball screw (Standard type)
Table size ： 40 mm x 40 mm
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High-grade Z stage, Ball screw (Symmetric type)
Table size ： 40 mm x 40 mm
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High-grade Z stage, Precision screw (Standard type)
Table size ： 50 mm x 50 mm
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High-grade Z stage, Precision screw (Symmetric type)
Table size ： 50 mm x 50 mm
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High-grade Z stage, Ball screw (Standard type)
Table size ： 50 mm x 50 mm
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