| Direction of travel |
XY axis two directions |
| Table size |
130 mm x 200 mm |
| Clamp method |
Split clamp |
| Mounting position |
Center |
| Transfer mechanism |
Feed screw P=1 mm (Manual operation) |
| Travel |
+/-50 mm |
| Lead of actuator |
1 mm |
| Scale interval |
Vernier reading 0.05 mm/Scale display unit 0.0005 mm (0.5μｍ) |
| Guiding method |
V-groove and cross rollers |
| Travel accuracy HV |
Straightness (horizontal and vertical) 0.003mm |
| Travel accuracy YP |
Yawing 15sec, Pitching 15sec |
| Moment rigidity |
Yawing rigidity 0.02 sec/N・cm, Pitching rigidity 0.02 sec/N・cm, Rolling rigidity 0.01 sec/N・cm |
| Parallelism |
0.06 mm |
| XY Perpendicularity |
0.02 mm |
| Load capacity |
216 N (22 kgf) |
| Weight |
16 kg |
| Material / Surface treatment |
Steel/Kanigen plating(table), Paint(base) |
| Linear scale |
Magnescale |
| Standard accessories |
Mounting screw : Hexagon socket head cap screw M5, 4 screws |