Autofocus System

AF-77VB

1
Autofocus System (for Revolving nosepiece type)
Estimate separately

Product documentation

Description

●Revolving nosepiece model with multiple objective lems for versatle use.
●Combination of microscope revolving nosepiece (manual and motorized) enables observation at low to high magnifications.
●The compact design allows for easy integration into inspection equipment.


Customer voices
Semiconductor inspection equipment manufacture B
High-perfomance autofocus system are essentiial for wafer inspection equipment.


*AutoFocusSystem catalog (Published November 2024, English) is download from here. PDF download, approx. 9 megabytes. (Opens in a new window).

*Autofocus catalog (Published August 2020, old version, both English and Japanese) is download from here. PDF download, approx. 9 megabytes. (Opens in a new window).

Specifications

Objective lenses Compatible with major microscope manufacturers
Focusing Pattern projection and line autofocus method
AF accuracy Within ±1/4 of depth of focus
Observation method Bright field observation (dark field and differential interference observation also supported)
Camera mount C-mount : imaging sensor size 2/3 or less
AF Light source LED light source (780 or 550 nm)
Detector Line sensor
Z-axis drive unit This can be combined with various drive units.
Control equipment Dedicated controller (AFC-6)

Description photos

Explanatory diagram

Supplementation