| Direction of travel |
XY axis two directions |
| Travel |
+/-10 mm |
| Table size |
50 mm x 50 mm |
| Motor |
Equivalent to PK523HPB (5-wire type pentagonal connection 0.75A /phase) |
| Resolution |
0.002 mm |
| Feed screw |
Ball screw |
| Feed screw lead |
1 mm |
| Guiding method |
HG-VCR (V-groove and Cross roller) |
| Travel accuracy HV |
Straightness (horizontal and vertical) 0.002 mm |
| Travel accuracy YP |
Yawing 15sec, Pitching 25sec |
| Positioning accuracy |
0.008 mm |
| Repeatability |
+/-0.0003 mm |
| Lost motion |
0.001 mm |
| Parallelism of motion |
0.02 mm |
| XY Perpendicularity |
0.006 mm |
| Moment rigidity |
0.3sec/N*cm (Yaw), 0.4sec/N*cm (pitch), 0.4sec/N*cm (roll) |
| Load capacity |
39.2 N (4 kgf) |
| Weight |
0.86 kg |
| Maximum speed |
16 mm/s (at 8,000 pps) |
| Material / Surface treatment |
Aluminum alloy/Black alumite |
| HOME sensor |
Normally closed contact (break contact, B contact) operation, Photo sensor
*non-adjustable |
| Pre-HOME sensor |
- |
| LIMIT sensor |
Normally closed contact (break contact, B contact) operation, Photo sensor
*non-adjustable |
| Compatible cable |
0.75-B type (ACB-STM2, ACB-STM3, ACB-STM-D3, ARC-STM2, ARC-STM-D2, ARC-STM3 or ARC-STM-D3, be sold separately) |
| Scale model |
Made of GSI Mercury (Glass scale, cable length 3m) |
| Scale resolution |
5μm to 0.05μm |
| Scale accuracy |
+/-60nm/0.02mm |
| Standard accessories |
Inspection certificate
Mounting screw : M3 Hexagon socket head cap screws (4 pcs) |
| Supplemental note |
*Dedicated parameter setting for QT-A (Parameter No.4): 36 |