| Direction of travel |
XY axis two directions |
| Table size |
40 mm x 40 mm |
| Clamp method |
Clamp plate |
| Mounting position |
Center |
| Transfer mechanism |
CMH-13RM (Standard micrometer head) |
| Travel |
+/-6.5 mm |
| Lead of actuator |
0.5 mm |
| Scale interval |
Micrometer head 0.01 mm |
| Minimum resolution |
3 μm |
| Guiding method |
HG-VCR (V-groove and cross rollers) |
| Travel accuracy HV |
Straightness (horizontal and vertical) 1 μm |
| Travel accuracy YP |
Yawing 15sec, Pitching 25sec |
| Allowable moment |
Yawing 500 N・cm, Pitching 500 N・cm, Rolling 500 N・cm |
| Moment rigidity |
Yawing rigidity 0.08 sec/N・cm, Pitching rigidity 0.06 sec/N・cm, Rolling rigidity 0.06 sec/N・cm |
| Parallelism |
30 μm |
| Parallelism of motion |
14 μm |
| XY Perpendicularity |
10 μm |
| Load capacity |
95.2 N (9.7 kgf) |
| Weight |
0.4 kg |
| Material / Surface treatment |
Stainless steel/Black chromium oxide |
| Standard accessories |
Inspection certificate Mounting screw : Hexagon socket head cap screw M3, 4 screws |