| Direction of travel |
Z axis one direction |
| Table size |
60 mm x 60 mm |
| Clamp method |
Clamp plate |
| Mounting position |
Side |
| Transfer mechanism |
Feed screw P=0.5 mm |
| Travel |
+/-6.5 mm |
| Lead of actuator |
0.5 mm |
| Scale interval |
- |
| Minimum resolution |
10 μm |
| Guiding method |
HG-VCR (V-groove and cross rollers) |
| Travel accuracy HV |
Straightness (horizontal and vertical) 1 μm |
| Travel accuracy YP |
Yawing 15 sec, Pitching 25 sec |
| Allowable moment |
Yawing1200 N・cm, Pitching 1200 N・cm, Rolling 1200 N・cm |
| Moment rigidity |
Yawing rigidity 0.04 sec/N・cm, Pitching rigidity 0.04 sec/N・cm, Rolling rigidity 0.02 sec/N・cm |
| Perpendicularity |
65 μm |
| Load capacity |
49 N (5㎏f) |
| Weight |
0.6㎏ |
| Material / Surface treatment |
Stainless steel, Aaluminum alloy (Z bracket)/Black chromium oxide, Black Alumite |
| Standard accessories |
Inspection certificate Mounting screw : Hexagon socket head cap screw M4, 4 screws |