X stage (Screw lead 5 mm)
Table size : 200 mm x 200 mm
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Table size : 200 mm x 200 mm
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X stage (Screw lead 5 mm)
Table size : 200 mm x 200 mm
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Table size : 200 mm x 200 mm
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Table size : 200 mm x 200 mm
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High-grade X stage, Rolled ball screw type
Table size : 60 mm x 60 mm
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High-grade X stage, Rolled ball screw type
Table size : 40 mm x 40 mm
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Table size : 30 mm x 30 mm
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High-grade X stage, Ball screw with scale (Symmetric type)
Table size : 70 mm x 70 mm
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High-grade X stage, Ball screw with scale (Standard type)
Table size : 70 mm x 70 mm
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High-grade X stage, Ball screw with scale (Symmetric type)
Table size : 60 mm x 60 mm
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High-grade X stage, Ball screw with scale (Standard type)
Table size : 60 mm x 60 mm
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High-grade X stage, Ball screw with scale (Symmetric type)
Table size : 50 mm x 50 mm
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High-grade X stage, Ball screw with scale (Standard type)
Table size : 50 mm x 50 mm
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High-grade X stage, Ball screw with scale (Symmetric type)
Table size : 40 mm x 40 mm
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