| Direction of travel | XY axis two directions | 
| Travel | +/-100 mm | 
| Table size | 200 mm x 200 mm | 
| Motor | PKP545N18B2 *The rated current of our products is 1.2A/phase. | 
| Resolution | 10 μm | 
| Feed screw | Ball screw | 
| Feed screw lead | 5 mm | 
| Guiding method | Ball way | 
| Travel accuracy HV | Straightness (horizontal and vertical) 0.02 mm | 
| Positioning accuracy | 80 μm | 
| Repeatability | +/-2 μm | 
| Lost motion | 5 μm | 
| XY Perpendicularity | 40 μm | 
| Moment rigidity | 0.04sec/N*cm (Yaw), 0.04sec/N*cm (pitch), 0.04sec/N*cm (roll) | 
| Load capacity | 392 N (40 kgf) | 
| Weight | 18 kg | 
| Maximum speed | 60 mm/s (at 6,000 pps) | 
| Material / Surface treatment | Aluminum alloy/White alumite | 
| HOME sensor | Normally open contact (make contact, A contact) operation, Photo sensor *non-adjustable
 | 
| Pre-HOME sensor | Normally closed contact (break contact, B contact) operation, Photo sensor *adjustable range : +/-100mm
 | 
| LIMIT sensor | Normally closed contact (break contact, B contact) operation, Photo sensor *adjustable range : 0 to +/-100mm
 | 
| Compatible cable | 0.75-A type (ACB-STD2, ACB-STD3, ACB-STD-D3, ARC-STD2, ARC-STD-D2, ARC-STD3 or ARC-STD-D3, be sold separately) | 
| Standard accessories | Inspection certificate Mounting screw : M6 Hexagon socket head cap screws (8 pcs)
 | 
| Dedicated parameter setting (Parameter No.4)
 | 14 |