Table size : 90 mm x 90 mm
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Table size : 90 mm x 90 mm
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Z stage, High precision and high stiffness type
Table size : 90 mm x 100 mm
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High-grade Z stage, Ball screw with scale (Standard type)
Table size : 70 mm x 70 mm
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High-grade Z stage, Ball screw with scale (Symmetric type)
Table size : 70 mm x 70 mm
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High-grade Z stage, Ball screw (Symmetric type)
Table size : 70 mm x 70 mm
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High-grade Z stage, Ball screw (Standard type)
Table size : 70 mm x 70 mm
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High-grade Z stage, Precision screw (Symmetric type)
Table size : 70 mm x 70 mm
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High-grade Z stage, Precision screw (Standard type)
Table size : 70 mm x 70 mm
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Table size : 60 mm x 60 mm
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High-grade Z stage, Ball screw with scale (Standard type)
Table size : 60 mm x 60 mm
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High-grade Z stage, Ball screw with scale (Symmetric type)
Table size : 60 mm x 60 mm
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High-grade Z stage, Ball screw (Symmetric type)
Table size : 60 mm x 60 mm
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High-grade Z stage, Ball screw (Standard type)
Table size : 60 mm x 60 mm
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High-grade Z stage, Precision screw (Symmetric type)
Table size : 60 mm x 60 mm
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