| Direction of travel |
Tilt |
| Travel |
+/-6° |
| Table size |
60 mm x 60 mm |
| Motor |
Equivalent to PK523HPB (5-wire type pentagonal connection 0.75A/phase) |
| Resolution |
0.000512° |
| Feed screw lead |
0.5 mm |
| Transfer mechanism |
Hybrid coupling mechanism/Feed screws |
| Guiding method |
V-groove and Cross roller |
| Positioning accuracy |
0.03° |
| Repeatability |
+/-0.002° |
| Stage height |
26 mm |
| Center of rotation |
96 mm |
| Positioning accuracy of rotatation center |
φ50 μm |
| Lost motion |
0.006° |
| Load capacity |
49 N (5 kgf) |
| Weight |
0.6 kg |
| Maximum speed |
2.6°/s (at 5,000 pps) |
| Material / Surface treatment |
Aluminum alloy / Black Alumite |
| HOME sensor |
Normally closed contact (breake contact, B contact) operation, Photo sensor
*non-adjustable |
| LIMIT sensor |
Normally closed contact (breake contact, B contact) operation, Photo sensor
*non-adjustable |
| Compatible cable |
0.75-B type (ACB-STM2, ACB-STM3, ACB-STM-D3, ARC-STM2, ARC-STM-D2, ARC-STM3 or ARC-STM-D3, be sold separately) |
| Standard accessories |
Inspection certificate
Mounting screw : M4 Hexagon socket head cap screws (4 pcs) |
Dedicated parameter setting
(Parameter No.4) |
36 |
| Supplemental note |
About Positioning accuracy of hybrid coupling mechanism tilt stage :
Positioning accuracy of complex coupling mechanism |