Straightor

TC-3

1
Straightor
Estimate separately

Product documentation

Features

  • It is a straightness measurement unit that can simultaneously measure four error components of straight movement (horizontal, vertical, yawing, and pitching).
  • Due to application of visible light source, Laser Diode, beams are visible, and therefore, setting can be easily done.
  • Detection block, which gives fine adjustment, is attached.
  • Remote box is available.

Specifications

Product number TC-3
Measuring distance Within 2500mm
Weight Optical source section 10kg, detection block 1.5 kg, counter 3.3kg
Size W218mmXD350mmXH172mm
Measurment distance
within 1000mm
Measurment distance
within 2500 mm
Items Scale interval Measurement range Measurement accuracy Measurement range Measurement accuracy
Displacement
measurement
Horizontal H 0.1μm ±100μm 1μm ±100μm 3μm
Vertical V 0.1μm ±100μm 1μm ±100μm 3μm
Yawing Y 0.1sec ±120sec 1sec ±120sec 2sec
Pitching P 0.1sec ±120sec 1sec ±120sec 2sec

Outline

StraightorTC-3 uses the laser beam as a basis and high-accurately measures four out of six error components occur during translating movement of an object simultaneously. The straightor uses the image sensor to utilize laser beam straightness, corner cube prism characteristics, and collimator principle. Four error components includes 2 displacement elements, yawing, and pitching.

Examples of applications

  • Straightness measurement of a linear stage
  • Straightness measurement of a linear guide
  • Positioning repeatability measurement of a robot arm
  • Transfer accuracy measurement of the wafer transfer unit
  • Material inspection of transfer accuracy inspection bridge of the head carriage such as floppy etc.
  • Displacement measurement of the die position of the injection machine
  • Laser printer head movement accuracy inspection
  • Coordinate measurement unit transfer accuracy inspection
  • Head straightness measurement of the surface mounting unit
  • High-precise dicing saw head transfer accuracy inspection

Measurement principle of straightor

Optical system

 Figure 1 shows the optical system.
 The straightener is the one-piece unit which consists of a straightness displacement measurement system making use of the corner cube prism's property and an angle displacement measurement system utilizing the auto collimator's principle.
 The laser beam is linearly-polarized light that is inclined at 45°toward paper surface, which in turn becomes a parallel beam giving rise to less noise because of the beam expander.
 Then, the beam which is reflected by the half mirror (HM) enters the image sensor 1. This is designed to detect a displacement of laser beam itself which may be caused by heat generation from laser, etc.
 Moreover, the transmitted beam will be split into the polarized light beam P and beam S by means of the polarizing beam splitter (PBS1), which are perpendicular to each other in a horizontal direction and a vertical direction, respectively, with respect to the paper surface.
 The transmitted polarized light beam P is used for straightness displacement measurement, and the transmitted polarized light beam S is used for angle displacement measurement. First, as shown in Figure 2, the polarized light beam P penetrates the PBS1, passes through 1/4 wavelength plate and becomes a circularly polarized light from a linearly polarized light. Second, the beam is reflected by the corner cube prism (CC1) which is mounted on an object to be measured, then becomes the polarized light beam S after passing through the 1/4 wavelength plate again.
 It finally, in turn, is reflected by the PBS1 and by the corner cube prism (CC2), and once again by the PBS1, passes through the 1/4 wavelength plate and becomes the original polarized light beam P, following which it penetrates the PBS1 and enters the image sensor 2 via M3.

Displacement measurement system

 As shown in Figure 3, if CC1 is displaced only by S, the beam will move for 4S on the image sensor 2. In other words, the resolution is increased by quadrupling the displacement optically.
 Next, the polarized light beam S which was reflected by the PBS1 will be reflected by the polarizing beam splitter (PBS2) and become a circularly polarized light after passing through the 1/4 wavelength plate.
 Then, it will be reflected by the mirror (M4) which is mounted on an object to be measured. The beam will pass through the 1/4 wavelength plate again, become the polarized light beam P and penetrate the PBS2, following which it will be focused onto the image sensor 3 by means of the collimator lens (L3).
 As shown in Figure 4, the inclination of M4 will be detected using the auto collimator's principle. On the assumption that L3's focal length is f, the beam movement (d) will be 2θ f when M4 is inclined only by θ.