| Direction of travel |
XYZ, three axis and rotation |
| Table size |
φ30 mm |
| Clamp method |
XYZ axis clamp plate, rotary axis complex clamp |
| Mounting position |
XY axis side |
| Transfer mechanism |
XY axis CMH-6.5RA, Z axis CMH-6.5F, Rotary axis CEH-6.5R (each axis standard micrometer head) |
| Travel |
XY axis +/-3 mm, Z axis 0～5 mm, Rotary axis coarse 360°fine +/-5° |
| Lead of actuator |
XYZ axis 0.5 mm, Rotary axis approx. 1.36° |
| Scale interval |
XYZ axis Micrometer head0.01mm,rotaryaxis Vernier reading2°／Micrometer head0.01mm（1 division approx0.027°） |
| Minimum resolution |
XYZ axis 0.003 mm |
| Guiding method |
XY axis HG-VCR (V-groove and cross rollers), Z axis V-groove and steel balls, Rotary axis sliding guide |
| Travel accuracy |
Straightness XY axis 0.002 mm, straightness Z axis 0.003 mm
Circularity 0.02 mm, deflection 0.02 mm |
| Load capacity |
9.8 N (1 kgf) |
| Weight |
0.28 kg |
| Material / Surface treatment |
Aluminum alloy/Black Alumite |
| Supplemental note |
※ For the Z stage is not symmetrical. For more information please check the external view of each product. |