Prices vary depending on the configuration. Please contact us for details.
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Ultimate height resolution Invisible "height" becomes reliable date!
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Advantages of implementation
■High Resolution for Improved Reliability
Accurately detects subtle changes in surface texture, significantly improving product reliability.
■Meets a Wide Range of Needs
We provide optimal solutions based on your application and budget.
■Flexible Support System
We also offer flexible support for software customization and analysis assistance.
Features
■High-speed, high-precision measurement achieved through optical interferometry
■Proprietary algorithms ensure wide-range measurement and ultimate height resolution
■Various measurement modes optimized for specific applications
■Comprehensive software modules for advanced analysis
■High-performance hardware configuration combining stability and precision
Departments that recommend implementation
● Research & Development Department
Improve product performance by evaluating surface texture
● Manufacturing Department
Strengthening product quality control to reduce defects
● Engineering Department
Promoting inspection standardization and efficiency
Equipment configuration
| Equipment |
OptoNume M7000 |
| Mechanical Frame |
Gantry frame structure |
| Imaging Camera |
2048 X 2048 pixel monochrome camera
*color camera optional, 1024 X 1024 mode selectable at startup |
| Measurement Objective |
Nikon two-beam interference objective lens |
| Piezo Scan Range |
100 μm (Effective 88 μm) |
| Z-Axis Drive |
Motorized (Effective 98 mm) |
| XY-Axis Drive |
Motorized 300 X 300 mm |
Motorized 450 X 450 mm |
| Tilt Stage |
Automatic 3-Axis (± 2 °) |
| PC & Monitor(dedicated desk type rack) |
Spec-compliant notebook PC with Windows 11 / 27" wide monitor |
| Vibration Isolation |
Medium size passive vibration isolator |
Large size passive vibration isolator |
| wafer Loader |
8-inch / 12-inch |
N/A |
Software Configuration
| Software function |
Software Name |
| Control management |
OPN100
OptoNume Base |
| Height Image Acquisition |
VIG300
Vertical Scanning Imager 3 |
| Data Management |
IDB100
Image Database |
| Image Analysis |
IAP100
Image Analysis Platform |
| Image Display |
3DC100
3D Contour Display |
| Shape Analysis |
PAA100: Pattern Analysis
FGA100: Shape Analysis |
| Structure Analysis |
LSA100: Layer Structure Analysis |
| Utilities |
SLI100: Sample Loading Interface / MSC100: Mirror Surface Correction |
Bold: Required software
Performance
| Performance |
M7000 |
| Effect Height Resolution |
0.015 nm *1 |
| Step Height Measurement Repeatability |
σ: 8 nm (for 8 μm step height standard) |
| Maximum Measurable Height |
Smaller of objective's working distance or 88 μm |
Smaller of objective's working distance (Up to 10 mm)
(2.5X interference objective lens) |
| Measurement Time |
≦ 7.0 seconds
(±5 μm scan with 20 nm sampling interval) |
*1 Under vibration conditions equal to or better than VC-C standard, measured on designated isolation table.
Interference objective lens(two-beam interference objective lens)
| Model |
Michelson type |
Mirau type |
| Magnification |
2.5X |
5X |
10X |
20X |
50X |
100X |
| NA |
0.075 |
0.13 |
0.3 |
0.4 |
0.55 |
0.7 |
| Working Distance (mm) |
10.3 |
9.3 |
7.4 |
4.7 |
3.4 |
2.0 |
| Depth of Focus (μm) |
48.5 |
16.2 |
3.3 |
1.71 |
0.90 |
0.56 |
| Field of View (μm) |
4448 X
4448 |
2224 X
2224 |
1112 X
1112 |
555 X
555 |
222 X
222 |
111 X
111 |
Pixel Resolution (μm)
(2048X2048 Pixels) |
2.18 |
1.09 |
0.55 |
0.28 |
0.11 |
0.06 |
●Depth of focus calculated by: DoF = ±1/2 X λ/(NA)2, λ=0.55 nm
●Field of view is based on Nikon lenses + 1" camera with 1X C-mount adapter.
●Michelson: Interference beam through beam splitter; Mirau: Compact, built-in reference path
Support system
Close collaboration with ATN Corporation, the developer and provider of OptoNume software, ensures rapid support for both hardware and software.
Sales Promotion, Quotation, Demonstration,
Evaluation, Closing, Instalation |
Maintenance, Repair |
CHUO PRECISION
Industrial Co,. Ltd. |
・Inquires and quotations
・Demoo evaluations
・Sales contacts and
delivery
・Installation
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・On-site calibration
・Repair services |
| ATN Corporation |
・Technical support
・Evaluation assistance |
Annual Software Maintenance Contract
・Remote troubleshooting
・Operation guidance
・Software upgrades
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